Filed: 1/7/2010 Granted: 12/13/2013 1436 days
Filed: 1/21/2010 Granted: 1/10/2014 1450 days
Filed: 1/21/2010 Granted: 5/24/2013 1219 days
Filed: 1/21/2010 Granted: 1/24/2014 1464 days
Filed: 2/4/2010 Granted: 9/16/2011 589 days
Filed: 2/18/2010 Granted: 1/13/2012 694 days
Filed: 2/25/2010 Granted: 10/26/2012 974 days
Filed: 2/25/2010 Granted: 10/26/2012 974 days
Filed: 3/4/2010 Granted: 5/24/2013 1177 days
Filed: 3/11/2010 Granted: 5/10/2013 1156 days
Filed: 4/2/2010 Granted: 10/12/2012 924 days
Filed: 4/15/2010 Granted: 9/2/2011 505 days
Filed: 4/15/2010 Granted: 9/6/2013 1240 days
シリコン酸化膜の形成方法、コンピュータ読み取り可能な記憶媒体およびプラズマ酸化処理装置
JP2010087185
Google Patents
Filed: 4/15/2010 Granted: 9/6/2013 1240 days
Filed: 4/15/2010 Granted: 1/24/2014 1380 days
Filed: 4/15/2010 Granted: 5/9/2014 1485 days